ALD course / Hanyang University Seoul Korea

This course will be given on 12 November 2018 at Hanyang University in Seoul, Korea. It is organized through The Korean Society of Semiconductor & Display Technology (KSDT) by prof. Hyeongtag Jeon. The speakers will be prof. Gregory Parsons and prof. Erwin Kessels.

The course will cover ALD basics (especially the underlying surface chemistry) as well as advanced ALD processes (including plasma-enhanced ALD and spatial ALD). The ALD processes addressed will mainly be related to applications relevant for the semiconductor and display industry.

Furthermore, recent developments in the field of atomic scale processing will be discussed. This includes area-selective deposition (ASD) and atomic layer etching (ALE).

The announcement can be downloaded here (PDF).

Course material can be downloaded here (password protected).

Preliminary schedule:

09:00-09:10 Greeting Prof. Park (KSDT)
09:10-09:20 Introduction ALD Academy Parsons, Kessels
09:10-10:00 Lecture preview Parsons, Kessels
10:00-10:50 ALD basics I
Surface chemistry
Kessels
10:50-11:10 Morning break
11:10-12:00 ALD basics II
Precursors
Parsons
12:00-13:30 Lunch break
13:30-14:20 Advanced ALD processes I
Plasma ALD
Kessels
14:20-15:10 Advanced ALD processes II
Spatial ALD
Parsons
15:10-15:30 Afternoon break
15:30-16:20 Atomic scale processing I
Atomic layer etching
Kessels
16:20-17:10 Atomic scale processing II
Area-selective deposition
Parsons
17:10-17:30 Wrap up & closing Parsons, Kessels

For additional information, please contact:

Prof. Hyeongtag Jeon

Division of Materials Science and Engineering

Hanyang University

Email address: hjeon@hanyang.ac.kr