ALD Short course North Carolina State University

On February 15th 2019 an ALD short course was held at the Monteith Research Center on NCSU’s Centennial Campus. The speakers were Prof. Gregory Parsons and Prof. Erwin Kessels. This course was mainly intended for students and postdocs already working on ALD or with having interest to use the ALD equipment at the center for their research. The course started at the introductory level but it included also more advanced topics topics such molecular deposition, energy-enhanced ALD and ALD reactor designs.

Responses to the course:







(4.6/5) The course was well presented by the speakers
(4.4/5) The course met my expectations
(4.2/5) The course provided useful skills
(4.4/5) The course was well setup
(4.4/5)I would recommend the course to others

A few quotes:

Each speaker was easy to understand and conveyed the material well

This course has been very exciting! I now have many useful resources for my ALD needs.

Appreciate focus on experimental design

The questions caused us to get behind, but I didn’t mind because I learned a lot from the discussions!

Some sections felt rushed. I learned a lot about ALD


8.45 – 9.00 Welcome and introduction to the ALD Academy
9.00 – 10.15 Introduction to ALD & prototypical Al2O3 case
10.15 – 10.45 Morning break
10.45 – 12.00 Dielectrics, Metals and MLD Organics
12.00 – 12.30 Presentation about NNF facility
12.30 – 13.30 Lunch break
13.30 – 14.45 Energy-enhanced ALD including plasma-enhanced ALD
14.45 – 15.15 Afternoon break
15.15 – 16.30 ALD reactors
16.30 – 17.00 Discussion / additional topics
17.00 – 17.15 Wrap up and closing