ALD Short course North Carolina State University

On the 15th of February an ALD short course will be held at the Monteith Research Center on NCSU’s Centennial Campus.

 

Program

8.45 – 9.00 Welcome and introduction to the ALD Academy
9.00 – 10.15 Introduction to ALD & prototypical Al2O3 case
10.15 – 10.45 Morning break
10.45 – 12.00 Dielectrics, Metals and MLD Organics
12.00 – 12.30 Presentation about NNF facility
12.30 – 13.30 Lunch break
13.30 – 14.45 Energy-enhanced ALD including plasma-enhanced ALD
14.45 – 15.15 Afternoon break
15.15 – 16.30 ALD reactors
16.30 – 17.00 Discussion / additional topics
17.00 – 17.15 Wrap up and closing

 

Registration
Cost of attendance is $50 for NCSU students, or $100 for industry users. Please contact Phil Barletta (pbarlet@ncsu.edu) to reserve a slot.