Biography: dr. Harm Knoops

Harm Knoops is a Technical Sales Specialist (ALD) for Oxford Instruments Plasma Technology (OIPT) and holds a part-time researcher position at the Eindhoven University of Technology (TU/e). Prior to joining OIPT in the beginning of 2014, he spent several years in post-doc positions related to plasma processing, solar cells and ALD. He obtained his Ph.D. degree in Applied Physics at Eindhoven University of Technology in 2011 titled: “Atomic Layer Deposition: From Reaction Mechanisms to 3D-integrated Micro-batteries”. Besides developing several ALD processes for nanostructured Li-ion batteries, fundamental insights into the underlying growth mechanisms were obtained which was essential for designing the processes and material properties to order. The possibility of conformal deposition by plasma-assisted ALD, a longstanding issue in the field, was resolved by theoretical simulations. In a work visit to Argonne National Labs, USA a similar issue in the field was resolved for ozone-based ALD by identifying loss processes as the cause of several industrially-relevant problems. During his postdocs, the research focused on plasma-deposited ZnO for CIGS solar cells. He supervised a small group of MSc and PhD students involved in ZnO-related projects, where a deeper understanding of electron scattering mechanisms in ZnO was obtained. After his postdoc and while working both at OIPT and TU/e he has focused on advancing the deposition and understanding in the ALD of nitrides which led to improvement of silicon nitride ALD and the understanding of redeposition effects in plasma ALD. Harm spends 10-20% of his time abroad in his current position for OIPT where he visits research groups, high-tech companies, international conferences and workshops. Harm has 34 published papers in peer-reviewed journals.